Top Wafer
Silicon Chamfering Machine
The wafer chamfering machine is specially used to process the edge of the wafer to remove sharp edges and to increase the strength of the edge so that cracks will not occur during further processing.
Product Parameters
| Customization supported? | Yes | Minimum travel distance of vacuum disc | <±0.01 |
| Total equipment weight | 350kg | Grinding speed | 1mm/s-50mm/s |
| External dimensions | 1740x840x980mm | Adsorption force | Better than -80 kPa |
| Grinding disc size | Customizable | Total power | 2KW |
| Workpiece size | 1-6inch | Main power supply | 380V |
| Grinding wheel speed | Adjustable from 0-4500rpm | Main motor speed | 0-90rpm |
| Wafer center positioning accuracy | ≤±0.1mm | Timing range | 99 hours and 59 minutes |
| Vacuum chuck repeatability | ≤±0.01mm | Working position | Group 1 |
Product Features
1. A precise control system allows for accurate setting and adjustment of parameters such as cutting speed and depth.
2. Semi-automatic operation: Only manual loading and unloading are required; the equipment can automatically perform grinding.
3. High processing precision: It can precisely control the chamfer angle, size, and surface roughness.
4. Processing various wafer sizes: It can accommodate wafers of different sizes and materials, such as 1-6 inch wafers, as well as OF wafers and rounded-edge wafers.
5. Good stability: The equipment typically uses high-quality materials and advanced manufacturing processes to ensure stable operation over long periods.
Equipment Principle

FAQ
Q1: Which cleaning methods can be used?
A: Chemical and ultrasonic cleaning can be utilized.
Q2: Is it cleanroom ready?
A: Yes it can be used in cleanroom applications.
Q3: What can be cleaned off?
A: Particulates, organics, and surface contamination.
Q4: Does it limit chemical usage?
Q5: Can the process be configured to customer specifications?
Related Equipment
Silicon Wafer Production Line
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